SECS Mobile Monitor

Mobile monitor enables monitoring of critical equipment parameters on your mobile device. It is a product for equipment manufacturers and refurbishes to customize and license it to their Fab customers.

 

Benefits:-

-Allows remote monitoring of critical parameters on mobile devices

-Prevents sim-processing of lots and extended equipment down time

-Improves engineering efficiency

-Works on most platforms – iOS, Android, Windows & Blackberry

-Auto refresh at defined interval

-Easy to setup

 

SECS GEM MANUAL & SIMULATOR

Areas of Equipment Software Expertise

• GEM Automation – SEMI compliant SECS/GEM Implementation
• Equipment Controller/GUI software Development or Maintenance
• Integration of sub-systems such as EFEM, robot, PLC, RFID and other devices/sensors
• Image Processing
• Data Collection and Analysis
• Custom module development
   
  eInnoSys is pioneer in automation on mobile platform and is one of the handful companies in the world having successfully designed equipment controller from scratch in Android, which is quite challenging since Android is not a real-time OS.

  In addition to consulting, software development and integration services, we offer the following products out-of-the-box.

  • EIGEMEquipment: SEMI complaint SECS/GEM software for equipment
  • EIMobileMonitor: Allows monitoring critical equipment or recipe parameters on mobile device within factory network
  • EIGEMSim: Host or Equipment simulator software for SECS/GEM communication testing
  • EIModbusLib: Java based Modbus library that can run on multiple platforms – Windows, Linux or Android
  
  

FAB Automation | Assembly & Test Manufacturing Automation

Our automation staff includes seasoned Industrial Engineers with deep understanding of semiconductor wafer processing, packaging, test and assembly processes and we design custom solutions, where needed to help you address your factory’s challenges or issues.

 

eInnoSys also offers following out-of-the-box systems for Fabs:

• EIGEMHost : SECS/GEM software for factory hosts
• EIGEMSim : Equipment and host simulator software for SECS/GEM testing
• EIRMS : Recipe Management System – Manages recipes, including versions and audit trail of recipe changes across different equipment types
• EIAMS : Alarm Management System – Taking automatic actions (user defined) as soon as an alarms occur on equipment, reporting and much more
• EIPartsManager : Spare Parts Management System – Helps manage spare parts cost, inventory and life-cycle.
• EIBarcodeGuardian : Prevents wrong pour of chemicals and manages chemical inventory in the fab
• EIQRSTS :- Reticle/Quartz/Sapphire Tracker – Helps tracking reticles/quartz/sapphire and other precious resources in the factory
• EIMWA : Manual Wetbench Automation – Prevents misprocessing of wafers due to wrong bath dips on manual wetbenches without expensive upgrade

SEMI PV2 (Photovoltaic Manufacturing)

The EIS TF(European Equipment Interface Specification Task Force ) decided to incorporate the already existing SEC/GEM standards in the Semiconductor Industry as the base for host communication through PV industry. This is the time when SEMI PV2 standard came into existence.

 

SEMI PV2 is the standard that defines a common equipment communication interface for PV (Photovoltaic Manufacturing) production system and gives various benefits to the PV industry.

This standard was developed by European Equipment Interface Specification Task Force (EIS TF) to minimize the efforts put in by the equipment suppliers to develop and maintain various equipment communication interfaces and to create a strong base for deploying advance factory management and to control software systems.

Equipment integration was a very costly and time consuming affair before this standard was implemented in equipment production industry.

With the implementation of this Standard both the manufacturers and the suppliers will be benefited in the following ways:

• Manufacturers need not specify ,test and integrate specific interfaces to ensure IT functionality at the factory level

• Suppliers need not implement and maintain customer specific interface

• Shorter break down time as there would standard IT integration process

• As the processes are standardize, thus will lead to yield improvement

• Simplified requirement specification and testing as the testing can designed in a generic way for all the interfaces

• This will lead to increased potential cost saving as the manufacturers’ are in better position to analysis integration risk and efforts.

This standard outlines one of the best practices which will help in great value addition to the semiconductor and PV industry.

SECS/GEM Plan-B Service

SECS/GEM Plan-B service is designed for those OEMs who have in-house software developer or team for the equipment software, but has very little to no backup. In other words, each developer is an expert in his/her own area, but if that person suddenly leaves the company or on time-off, no one else can cover if there is a customer problem.

 

Let us be your Plan-B software team! It’s like an insurance plan plus additional bandwidth plan!

How it Works

• Our team already has technology and domain expertise, since we are experienced in all areas of equipment software. All we need is familiarity to your development environment and code structure
• Depending on the complexity of the software, our team members will be engaged for a few days to a few weeks to become familiar with your environment to the level that they can make required changes without compromising reliability of the software
• Every few weeks, your development team will keep us up-to-date with changes to code
• Just call us when you need to use our developers who are already familiar with your environment.
• You could also use our team to add bandwidth to your existing team when you need.

Global leader in SECS/GEM

In addition to domain expertise and experience of many decades in Semiconductor, Solar (PV), Flat Panel Display, LED and other related Electronics industries, eInnoSys team has over 100 years of software design and development experience. Our team has designed very complex automation software systems that control and monitor multiple factories.

 

Quality and Innovation have always been core values at eInnoSys and our team keeps up‐to‐date with software design patterns and new software development methodologies.
Having knowledge and experience of best practices in both software development and equipment software of many different kind, our team is best equipped to review your equipment software’s design and make recommendations to –

• Improve quality and reliability of the software
• Improve performance of the software
• Make it more scalable, so that future modifications are less time-­‐consuming
• and more robust
• Help reuse code among multiple equipment platforms
• Make certain software modules configurable so that they can be modified
• without having to recompile and QA the code

implementing SECS/GEM and GEM300 standards

EIGEMSim is a SECS/GEM software product of eInnoSys that can be used as a simulator for either Fab host or Equipment for testing of compliance.

 

If you have already purchased a license of SECS/GEM or GEM300 software from another company, eInnoSys can still help you integrate that software with your controller software and benefit from our vast experience in terms of reducing the time and cost of integration.

GEM300 covers following SEMI standards:

• E30 – GEM (Generic Equipment Model)
• E39 – Object Services Standard
• E40 – Process Job Management
• E87 – CMS (Carrier Management Specification)
• E90 – Substrate Tracking
• E94 – Control Job Management

In addition, following other SEMI standards may be requested by factory customers:

• E116 – EPT (Equipment Performance Tracking)
• E157 – Module Process Tracking
• E148 – Time Synchronization

SECS/ GEM Controller/GUI Software

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

 

OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE –

• Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment
• Development of software for multi-­‐chamber, cluster equipment with multiple load ports and transport module
• Experience developing software for high-­‐vac equipment with loadlock and transport module
• First company in the industry to develop entire plasma etch equipment
• software entirely from scratch in Android, with SECS/GEM

PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

• Multi-­‐chamber plasma etch equipment with multiple load ports and a
• transport module
• Metrology equipment software to measure stress in the thin-­‐film based on
• topography of the wafer
• Laser scribe equipment

SECS/ GEM Controller/GUI Software

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

 

             OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE –

• Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment
• Development of software for multi-­‐chamber, cluster equipment with multiple load ports and transport module
• Experience developing software for high-­‐vac equipment with loadlock and transport module
• First company in the industry to develop entire plasma etch equipment
• software entirely from scratch in Android, with SECS/GEM

             PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

• Multi-­‐chamber plasma etch equipment with multiple load ports and a
• transport module
• Metrology equipment software to measure stress in the thin-­‐film based on
• topography of the wafer
• Laser scribe equipment

 

SECS GEM Sub-System Integration

When it comes to integrating sub-­‐tool, such as SMIF or FOUP, Robot handler, PLCs, RFID reader or any other device to your equipment, you need someone who not only has technical knowledge and domain expertise, but also someone who understands how your equipment is going to be used in the fab and what are your clients’ expectations from your tool’s automation capabilities. eInnoSys has experience integrating various sub-­‐tools and devices from different manufacturers with equipment controller software as well as providing SECS/GEM capability for the entire integrated equipment. Besides, due to our services on fab automation systems, we understand what your clients expect from the equipment software to integrate them better with their factory systems.

 

                 AREAS OF EXPERTISE

• FOUP
• SMIF
• Robot handler
• PLCs
• RFID
• Individual devices such IO couplers, cameras and sensors

SECS/GEM SERVICES

Einnosys offers various delivery models to best suit your needs, including Turnkey solution, staff augmentation and 24×7 support.

If you already have a team of software engineer for your equipment, you must have found the need to increase the bandwidth of your software team, most likely more than once at least for short term.
Einnosys offers staff augmentation service to help in such situations where you want to increase the bandwidth for short or long term. Our developers are already experts at development of equipment controller/GUI software, SECS/GEM implementation, image processing software, data collection and analysis software, integration of sub-systems such as EFEM, PLCs, etc and all areas of equipment software.

What Staff Augmentation Gives You 

• Highly qualified and dedicated software engineers to match skills of your requirements
• Quality developers with semiconductor and related industry experience
• Tools & Technologies: C++, Java, .Net, SECS/GEM, Databases, MESes and other tools and technologies used in the industry
• Platforms: Windows, Linux/Unix, Android
• Onsite and offsite, most prefer a combination
• Short-term or long-term to suit your needs

Introduction to SECS/GEM

SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) are communication interface protocols for communication between a semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products and change variables. With SECS/GEM, all this can be performed in a standard way. SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). Check www.SEMI.org to learn more about SEMI standards and SECS/GEM protocol.

 

In simple words, the SECS/GEM standard defines messages, state machines and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30, but frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines common set of equipment behavior and communication capabilities to provide functionality as well as flexibility to support manufacturing. Since GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV.

Among the capabilities offered by the SECS/GEM standard is –

• For fab host to start and stop processing

• For fab host to select, download and upload recipes from/to the equipment

• For fab host to query the equipment for values of various process parameters and equipment configuration

• For fab host to set equipment configuration parameter values

• For equipment to send alarms to the fab host

• For fab host to define reports of various variables and associate them with events such as lot start or wafer complete

• For equipment to send various events and associated reports to the fab host

Since SECS/GEM is a communication protocol, it is platform and technology as well as programming language independent. The host side of a connection is executing on a computer system provided by the factory, and the equipment side of a connection is running on a controller computer provided by the equipment manufacturer. This gives both – the fab as well as the equipment manufacturer interoperability, flexibility and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as both of them are adhering to SECS/GEM standards.

eInnoSys offers SECS/GEM software solutions for equipment manufacturers (OEMs) as well as factories (FABs or ATMs). By integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the cost and time it takes to make their equipment SECS/GEM capable. Likewise, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be configured as host or equipment to test SECS/GEM communication of the other.

SECS describe the communication between a host computer and the equipment using a single connection. In the original concept and even today in the most common scenario, the equipment provides a single SECS interface for exclusive use by a single host. The message types defined by SECS are partially asymmetric – some message types are defined only for host use, others are defined only for equipment, but also many of them are defined for the same use by either side.

However, there is provision in the SECS standards for sharing a connection by specifying the device identification value in each message. The practice of connection sharing is not recommended for new deployments. It is a common practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are light weight and don’t use much network bandwidth. It is possible to run several SECS connections on a typical desktop computer. https://www.einnosys.com/introduction-secs-gem/