SECS/GEM Software Review

In addition to domain expertise and experience of many decades in Semiconductor, Solar (PV), Flat Panel Display, LED and other related Electronics industries, eInnoSys team has over 100 years of software design and development experience. Our team has designed very complex automation software systems that control and monitor multiple factories.

 

Having knowledge and experience of best practices in both software development and equipment software of many different kind, our team is best equipped to review your equipment software’s design and make recommendations to –

• Improve quality and reliability of the software
• Improve performance of the software
• Make it more scalable, so that future modifications are less time-­‐consuming
• and more robust
• Help reuse code among multiple equipment platforms
• Make certain software modules configurable so that they can be modified
• without having to recompile and QA the code

More Details:-https://www.einnosys.com/integration-services/software-review/

Semi Conductor Equipment Communication Standard

As we talk about SEMI, SECS and GEM. Firstly let us understand what these acronyms are.
SECS refers to Semi Conductor Equipment Communication Standard, GEM refers to Generic Equipment Model for Communications and Control of Manufacturing Equipment and SEMI stands for Semiconductor Equipment Materials Initiative.
Semiconductor Equipment Materials Initiative ( SEMI ) developed a set of standards called SECS/GEM. These standards are used to define a set of communication protocols between automated equipment and the hosts.



SEMI standards came into existence somewhere in 1970’s. The idea behind introduction of such a standard was to support the small but blooming semiconductor industry. SEMI brought a standard in communication protocol between various semiconductor equipment and fab hosts. This eliminated the need for the communication specification that were equipment or fab host specific. In that way, these standards are similar to how TCP/IP protocol is defined for network communication or how RS232 is defined for serial communication.
Earlier there was no standard process to handle the communication between a semiconductor equipment and a fab host. This used to lead in high cost and low performance in semiconductors industry. So this created a need for standard process to tackle this situation. That’s where the SEMI standards for SECS/GEM came into existence.
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info@einnosys.com
 

FAB Automation Manufacturing Automation

FAB Automation | Assembly & Test Manufacturing Automation

eInnoSys staff has decades of extensive experience in Fab Automation of varying size and kind – from 4 inch GaAs or other compound semiconductor to 300 mm Silicon fabs as well as Packaging, Test/Assembly factories. Our team members have helped small R&D type fabs with old equipment to most advanced 300mm high volume  factories.

 

n addition to successful implementation of conventional automation on well over 300 equipment make and model, we have developed several hundred innovative applications to help factories with –

• How to develop systems and reports that combine data collected from various equipment and other factory data sources such as MES, ERP, etc to drive efficiencies (Yield, Cycle Time, OEE, etc) in fabs/factories and reduce cost through innovative automation
• How to collect data from and even download recipes to equipment that are not SECS/GEM capable

More Information...

SECS/GEM GUI Software

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

 

OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE –

• Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment
• Development of software for multi-­‐chamber, cluster equipment with multiple load ports and transport module
• Experience developing software for high-­‐vac equipment with loadlock and transport module
• First company in the industry to develop entire plasma etch equipment
• software entirely from scratch in Android, with SECS/GEM

  PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

   

  • Multi-­‐chamber plasma etch equipment with multiple load ports and a
  • transport module
  • Metrology equipment software to measure stress in the thin-­‐film based on
  • topography of the wafer
  • Laser scribe equipment

  More information...

  
  

 

SECS GEM Improvement

Einnosys offers various solutions for Yield Improvement, ranging from simple barcode scanning of the lot boxes to very complex analysis of yield related issues by correlating end-to-end wafer data. Our team members have decades of experience in improving yield at all areas of Assembly, Test, Packaging factories and FABs. In addition to implementing complex yield improvement projects, our staff has published technical papers on how to use innovative, out-of-the-box automation to improve yield in factories.

 

Yield Management Solutions:-

1. Host applications or station controllers that download and/or select recipes upon barcode or RFID scanning of lot boxes and remotely starting process.
2. Collection and analysis of alarms, events and other critical process parameters from equipment through SECS/GEM or other means and correlating with other data such as that from MES or from other equipment 
3. For Wafer FABs, correlating end-to-end wafer data: From epitaxial -> inline process <-> inline metrology<-> electrical testing <->Final Test
   
    
4. Use feedback and feed-forward approach to feed metrology data to process equipment to improve yield 
5. More Detail...

SECS GEM For Communication

eInnoSys offers SECS/GEM software solutions for equipment manufacturers (OEMs) as well as factories (FABs or ATMs). By integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the cost and time it takes to make their equipment SECS/GEM capable.

Likewise, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be configured as host or equipment to test SECS/GEM communication of the other. 

SECS describe the communication between a host computer and the equipment using a single connection. In the original concept and even today in the most common scenario, the equipment provides a single SECS interface for exclusive use by a single host. The message types defined by SECS are partially asymmetric – some message types are defined only for host use, others

are defined only for equipment, but also many of them are defined for the same use by either side.  

More information:-https://www.einnosys.com/introduction-secs-gem/