EIGEMSim is a SECS/GEM software product of eInnoSys that can be used as a simulator for either Fab host or Equipment for testing of compliance.
If you have already purchased a license of SECS/GEM or GEM300 software from another company, eInnoSys can still help you integrate that software with your controller software and benefit from our vast experience in terms of reducing the time and cost of integration.
GEM300 covers following SEMI standards:
- E30 – GEM (Generic Equipment Model)
- E39 – Object Services Standard
- E40 – Process Job Management
- E87 – CMS (Carrier Management Specification)
- E90 – Substrate Tracking
- E94 – Control Job Management
In addition, following other SEMI standards may be requested by factory customers:
- E116 – EPT (Equipment Performance Tracking)
- E157 – Module Process Tracking
- E148 – Time Synchronization
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