When it comes to integrating sub-‐tool, such as SMIF or FOUP, Robot
handler, PLCs, RFID reader or any other device to your equipment, you
need someone who not only has technical knowledge and domain expertise,
but also someone who understands how your equipment is going to be used
in the fab and what are your clients’ expectations from your tool’s
automation capabilities. eInnoSys has experience integrating various
sub-‐tools and devices from different manufacturers with equipment
controller software as well as providing SECS/GEM capability for the
entire integrated equipment. Besides, due to our services on fab
automation systems, we understand what your clients expect from the
equipment software to integrate them better with their factory systems.
AREAS OF EXPERTISE
- FOUP
- SMIF
- Robot handler
- PLCs
- RFID
- Individual devices such IO couplers, cameras and sensors
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