What is SECS/GEM?

1. SECS (SEMI Equipment Communication Standards) and GEM (Generic Model For Communications and Control Of Manufacturing Equipment) standard is published and maintained by SEMI.org, an international organization of semiconductor manufacturers, is an organization body that governs the standard for semiconductor manufacturing.
2. It is the main communication protocol used in automation for (initially) semiconductor/electronics industries, however, today it has been widely adopted in photovoltaic and SMT industries too.
3. It provides a communication interface between equipments and host systems.
4. Unlike other communication protocol like PLC, it enable equipments from variety of vendors to communicate using standard and consistent protocol with various type of Host systems. 

 To understand the SECS/GEM standards you will need to purchase the following 3 basic standards from SEMI:  

1. SEMI E30 GEM Standard - This is the "Brain" that defines the behaviours of equipment (Business Rules), state machine and some rules like which SECS-II messages should be used, in what situations, and what the resulting activity should be. It also defines the functionalities like Status Data Collections, Trace Data Collection, Alarms Management, Spooling, Remote Command, etc.
2. SEMI E5 SECS-II - Defines the details of the interpretation of messages (APIs) exchanged between equipment a host. It also defines message inputs/outputs data structure, data item format, acknowledgement codes, etc.
3. SEMI E37 HSMS - High Speed SECS Message Services. This is a transport layer based on TCP/IP protocol and a successor of the previous SEMI E4 SECS-I standard that is based on serial communication. This is also the layer where the SECS-II messages are encoded into HSMS message format.

SECS/GEM Data Items

SECS/GEM is an industry standard, that defines standard process of communication between equipment and fab host software for controlling and monitoring purposes. By connecting SECS/GEM equipment, fabs can immediately gain operational benefits. Factory hosts can collect data in multiple ways. Along with event reports, the fab host often requires to poll the equipment for current data values. The host can directly request Data values , or can be sampled periodically in a trace report this process is called Data Polling

There are 3 categories of Data Items defined in SECS/GEM standards:

 

Status Variables (SV)

Status variables are data items that identify the status of the equipment, or any of its components, such as sensors, meters, etc. Examples of status variables for process equipment are – Temperature, Pressure, Gas Flows, RF Forward Power, Spin Speed, etc. These data items are generally not attached to events such as lot start, wafer start, etc. A factory host can query the status variables to the equipment any time or can define trace data setup through which it asks the equipment of supplying status variables at regular intervals. A factory host cannot change status variables of the equipment.

Data Value Variables (DV)

Data value variables are data items that are related to a certain event, such as lot start, alarm/error occurring on the equipment, wafer processing/measurement complete, etc. Examples of data value variables are – LotID, SlotNumber, CurrentRecipe, etc. These variables change only when a certain event occurs, such as selecting a recipe, starting lot processing, etc. A factory host queries Data Value variables through defining reports and associating the reports to events.

Unlike status variables, data value variables may not have a value. For example, one of the data value variable is AlarmID, which designates the ID of the most recent alarm. However, it can be empty if there haven’t been any alarms since the equipment was turned ON. A factory host cannot change the data variables of the equipment.

Equipment Constants (EC)

Equipment constants are data items related to the configuration of the equipment – they could contain items related to the equipment hardware, software or SECS/GEM software. Unlike status variables and data value variables, a factory host can change equipment constants through SECS messages. Examples of equipment constants are – PumpDown Time Limit, Equipment Standby Time, Pins Up Wait, etc.

Data Properties:

The Data types listed above have similar properties so that it’s convenient to define the data. The equipment supplier is required to provide these properties in a SECS/GEM manual so that the fab host will be able to understand and communicate with the data. Below are some of the important data properties of the Data Types:

• ID – It’s a numeric ID that must be unique in the SECS/GEM interface. These IDs can be grouped by data type and are referred to as SVIDs (Status Variable IDs), DVIDs (Data Variable IDs) and ECIDs (Collection Event IDs).
• Name – It’s a name assigned to a data item so that we can identify it easily.
• Format –Data type of the item.
• Data formats can be simple (numeric, ASCII, Boolean) or complex (arrays, lists, structures). For example, numeric types can be I1, I2, I4, I8 (signed integer types of different byte length), U1, U2, U4, U8 (unsigned integer types) and F4 or F8 (floating point types).
• Array types and List contain multiple values in the data item. For example, image data will be formatted as a Byte Array.
• Structure types contain a specific type of data. For example, a variable may represent a slot map which contains carrier information and also list of slots with their wafer placement status.
• Value –It’s the actual value of the data item. Data values are in an accurate, efficient, self-describing binary format so that its easy for the host to interpret the data. The data format allows collection of more data and with more efficiency.

Alarms & Collection Events (CE) also have IDs and names for their identification.

Data Polling :

The fab host often gets data on a regular intervals through event reports & trace reports and that it defines. SECS/GEM also provides a system for the fab host to poll data based on its needs.

Fab Automation services.

Fab Automation Standards – SECS/GEM & EINNOSYS SOLUTIONS

The organization that defines and governs the standards for semiconductor manufacturing, equipment, automation and other relevant areas is SEMI.org. It is an international body for semiconductor manufacturers and equipment manufacturers.
Factory automation standards defined by SEMI are generally known as SECS/GEM standards, which for 200mm wafer processing is comprised of four main standards : SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) standards.

 

Lets understand what each standard covers: 

• SECS-I (E4) : This standard is a communication protocol based on RS-232 serial communications. This is a much slower as compared to HSMS.
• SECS-II (E5) : This standard defines how information is passed between an equipment and a factory host in the form of a series of stream and function messages.
• HSMS (E37): This standard defines a communication protocol based on TCP/IP.
• GEM (E30) : This standard not only defines how to use the core SECS-II messages to perform particular tasks, such as event report, data collection and recipe management but also takes care of the behaviour of the equipment when interfacing with the host.

Since SECS/GEM is a communication protocol, it is technology, platform as well as programming language independent. The host side of a connection is run on a computer system typically provided by the fab, and the equipment side of a connection is executing on a controller computer provided by the equipment manufacturer. This gives both – the factory as well as the equipment manufacturer interoperability, flexibility and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as they both are adhering to SECS/GEM standards.
SECS/Gem standards define the communication between a host computer and the equipment typically using a single connection, however multiple connection from more than one automation systems to a single equipment is possible. The message types defined by SECS are partially asymmetric – some message types are defined only for equipment use, others are defined only for host, but also many of the messages are for the similar use on either side.
The practice of connection sharing is not recommended for new deployments. It is a prevelant practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are light and don’t use much network bandwidth. It is possible to run several SECS connections on a simple desktop computer.
Most Semiconductor, solar cell, FPD and LED manufacturing factories are demanding the equipments that are SECS/GEM standard compliant. For those who are not familiar with SECS/GEM standards, to learn and implement these standards on the equipment software can be quite complex, challenging and time consuming.That is why, we at eInnoSys offer SECS/GEM software solutions for equipment manufacturers as well as factories. Integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the time and cost it takes to make their equipment SECS/GEM compatable. Similarly, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be used to simulate as a equipment or host to test SECS/GEM communication of the other.

SECS/GEM for non-GEM/SECS Equipment

Can’t get SECS/GEM on your fab or assembly equipment? We WILL get you!

If you have an equipment without GEM/SECS capability and if you can’t get it from the OEM, we can help you. eInnoSys provides a software solution that offers most of the GEM/SECS features. It doesn’t matter how old the equipment is or whether the equipment is running through a computer with Windows or Unix/Linux operating system, our solution works on most equipment. This solution works equally well on both wafer fab equipment as well as back-end test, assembly and packaging equipment. 

 

With eInnoSys provided GEM/SECS solution on your equipment, you can achieve the same benefit on those equipment as you do with modern SECS/GEM compliant equipment. Now you can improve yield, collect and analyze data automatically, download and upload recipes and a lot more. When it comes to providing GEM/SECS on an equipment without OEM provided solution, there is no one-size-fit-all approach. That’s why our engineering team first evaluates your equipment and recommends a solution that is best for you.

SECS/GEM GUI Software

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

 

OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE –

• Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment
• Development of software for multi-­‐chamber, cluster equipment with multiple load ports and transport module
• Experience developing software for high-­‐vac equipment with loadlock and transport module
• First company in the industry to develop entire plasma etch equipment
• software entirely from scratch in Android, with SECS/GEM

  PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

   

  • Multi-­‐chamber plasma etch equipment with multiple load ports and a
  • transport module
  • Metrology equipment software to measure stress in the thin-­‐film based on
  • topography of the wafer
  • Laser scribe equipment

  More information...

  
  

 

SECS Mobile Monitor

Mobile monitor enables monitoring of critical equipment parameters on your mobile device. It is a product for equipment manufacturers and refurbishes to customize and license it to their Fab customers.

 

Benefits:-

-Allows remote monitoring of critical parameters on mobile devices

-Prevents sim-processing of lots and extended equipment down time

-Improves engineering efficiency

-Works on most platforms – iOS, Android, Windows & Blackberry

-Auto refresh at defined interval

-Easy to setup

 

SECS/ GEM Controller/GUI Software

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

 

OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE –

• Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment
• Development of software for multi-­‐chamber, cluster equipment with multiple load ports and transport module
• Experience developing software for high-­‐vac equipment with loadlock and transport module
• First company in the industry to develop entire plasma etch equipment
• software entirely from scratch in Android, with SECS/GEM

PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

• Multi-­‐chamber plasma etch equipment with multiple load ports and a
• transport module
• Metrology equipment software to measure stress in the thin-­‐film based on
• topography of the wafer
• Laser scribe equipment

Introduction to SECS/GEM

SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) are communication interface protocols for communication between a semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products and change variables. With SECS/GEM, all this can be performed in a standard way. SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). Check www.SEMI.org to learn more about SEMI standards and SECS/GEM protocol.

 

In simple words, the SECS/GEM standard defines messages, state machines and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30, but frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines common set of equipment behavior and communication capabilities to provide functionality as well as flexibility to support manufacturing. Since GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV.

Among the capabilities offered by the SECS/GEM standard is –

• For fab host to start and stop processing

• For fab host to select, download and upload recipes from/to the equipment

• For fab host to query the equipment for values of various process parameters and equipment configuration

• For fab host to set equipment configuration parameter values

• For equipment to send alarms to the fab host

• For fab host to define reports of various variables and associate them with events such as lot start or wafer complete

• For equipment to send various events and associated reports to the fab host

Since SECS/GEM is a communication protocol, it is platform and technology as well as programming language independent. The host side of a connection is executing on a computer system provided by the factory, and the equipment side of a connection is running on a controller computer provided by the equipment manufacturer. This gives both – the fab as well as the equipment manufacturer interoperability, flexibility and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as both of them are adhering to SECS/GEM standards.

eInnoSys offers SECS/GEM software solutions for equipment manufacturers (OEMs) as well as factories (FABs or ATMs). By integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the cost and time it takes to make their equipment SECS/GEM capable. Likewise, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be configured as host or equipment to test SECS/GEM communication of the other.

SECS describe the communication between a host computer and the equipment using a single connection. In the original concept and even today in the most common scenario, the equipment provides a single SECS interface for exclusive use by a single host. The message types defined by SECS are partially asymmetric – some message types are defined only for host use, others are defined only for equipment, but also many of them are defined for the same use by either side.

However, there is provision in the SECS standards for sharing a connection by specifying the device identification value in each message. The practice of connection sharing is not recommended for new deployments. It is a common practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are light weight and don’t use much network bandwidth. It is possible to run several SECS connections on a typical desktop computer. https://www.einnosys.com/introduction-secs-gem/

SECS/GEM, Industry 4.0

eInnoSys is a global leader in Equipment Software & Fab Automation for

Semiconductor, Solar(PV), LED, FPD and other related Electronics industries

 

Experts at SECS/GEM, GEM300, Smart Factory &
Industry 4.0

Domain knowledge isn’t sufficient!

Our team has spent 60+ years working in the Fab/Assembly for OEMs

SECS/GEM & GEM 300

LET OUR EXPERTS SAVE YOU SIGNIFICANT COST AND TIME AND GUARANTEE SUCCESS OF SECS/GEM IMPLEMENTATION OF YOUR EQUIPMENT

 

For over two decades, eInnoSys team members have been implementing SECS/GEM and GEM300 standards on the equipment as well as using them in the fab/assembly for automation. We offer complete turnkey solution to make your equipment fully SECS/GEM or GEM300 compliant. Our domain knowledge and experience not only helps making your implementation a success but also greatly reduces the time and cost of integration. Our solution comes with required manuals, SECS/GEM and GEM300 compliance report along with required logs for OEMs to provide to their factory customers.
SECS/GEM & GEM300 are a set of communication protocol for a semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards.
EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with support for most of the SECS messages for 200mm out‐of‐the‐box.

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It provides compliance of following SEMI standards for your equipment

• E30 – GEM (Generic Equipment Model)
• E5 – SECS-II message format
• E37 – HSMS (Ethernet) connectivity
• E4 – SECS-I serial (RS232) connectivity

Ultra light-­‐weight product, which means more CPU and memory for your controller software, who needs it most
It is a SDK (Software Development Kit) that offers APIs for integration with controller software in multiple languages – C#, Java and C++
Multiple platform support – Windows, Linux, Unix & Android
Comes bundled with EIGEMSim – Simulator software for Fab Host
SECS/GEM Manual is included

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EIGEMSim is a SECS/GEM software product of eInnoSys that can be used as a simulator for either Fab host or Equipment for testing of compliance.

If you have already purchased a license of SECS/GEM or GEM300 software from another company, eInnoSys can still help you integrate that software with your controller software and benefit from our vast experience in terms of reducing the time and cost of integration.

GEM300 covers following SEMI standards:

• E30 – GEM (Generic Equipment Model)
• E39 – Object Services Standard
• E40 – Process Job Management
• E87 – CMS (Carrier Management Specification)
• E90 – Substrate Tracking
• E94 – Control Job Management

In addition, following other SEMI standards may be requested by factory customers:

• E116 – EPT (Equipment Performance Tracking)
• E157 – Module Process Tracking
• E148 – Time Synchronization