For
over two decades, eInnoSys team members have been implementing SECS/GEM
and GEM300 standards on the equipment as well as using them in the
fab/assembly for automation. We offer complete turnkey solution to make
your equipment fully SECS/GEM or GEM300 compliant. Our domain knowledge
and experience not only helps making your implementation a success but
also greatly reduces the time and cost of integration. Our solution
comes with required manuals, SECS/GEM and GEM300 compliance report along
with required logs for OEMs to provide to their factory customers.
SECS/GEM & GEM300 are a set of communication protocol for a
semiconductor equipment and factory host. These standards are maintained
by SEMI. While GEM300 refers to a set of communication standards for
300mm wafers, which are more than those for 200mm, SECS/GEM is used as a
generic term for both 200 and 300mm communication protocols and other
automation standards.
EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with
support for most of the SECS messages for 200mm out‐of‐the‐box.
It provides compliance of following SEMI standards for your equipment
- E30 – GEM (Generic Equipment Model)
- E5 – SECS-II message format
- E37 – HSMS (Ethernet) connectivity
- E4 – SECS-I serial (RS232) connectivity
Ultra light-‐weight product, which means more CPU and memory for your controller software, who needs it most
It is a SDK (Software Development Kit) that offers APIs for
integration with controller software in multiple languages – C#, Java
and C++
Multiple platform support – Windows, Linux, Unix & Android
Comes bundled with EIGEMSim – Simulator software for Fab Host
SECS/GEM Manual is included
EIGEMSim is a SECS/GEM software product of eInnoSys that can be
used as a simulator for either Fab host or Equipment for testing of
compliance.
If you have already purchased a license of
SECS/GEM or GEM300
software from another company, eInnoSys can still help you integrate
that software with your controller software and benefit from our vast
experience in terms of reducing the time and cost of integration.
GEM300 covers following SEMI standards:
- E30 – GEM (Generic Equipment Model)
- E39 – Object Services Standard
- E40 – Process Job Management
- E87 – CMS (Carrier Management Specification)
- E90 – Substrate Tracking
- E94 – Control Job Management
In addition, following other SEMI standards may be requested by factory customers:
- E116 – EPT (Equipment Performance Tracking)
- E157 – Module Process Tracking
- E148 – Time Synchronization