What is SECS/GEM?

1. SECS (SEMI Equipment Communication Standards) and GEM (Generic Model For Communications and Control Of Manufacturing Equipment) standard is published and maintained by SEMI.org, an international organization of semiconductor manufacturers, is an organization body that governs the standard for semiconductor manufacturing.
2. It is the main communication protocol used in automation for (initially) semiconductor/electronics industries, however, today it has been widely adopted in photovoltaic and SMT industries too.
3. It provides a communication interface between equipments and host systems.
4. Unlike other communication protocol like PLC, it enable equipments from variety of vendors to communicate using standard and consistent protocol with various type of Host systems. 

 To understand the SECS/GEM standards you will need to purchase the following 3 basic standards from SEMI:  

1. SEMI E30 GEM Standard - This is the "Brain" that defines the behaviours of equipment (Business Rules), state machine and some rules like which SECS-II messages should be used, in what situations, and what the resulting activity should be. It also defines the functionalities like Status Data Collections, Trace Data Collection, Alarms Management, Spooling, Remote Command, etc.
2. SEMI E5 SECS-II - Defines the details of the interpretation of messages (APIs) exchanged between equipment a host. It also defines message inputs/outputs data structure, data item format, acknowledgement codes, etc.
3. SEMI E37 HSMS - High Speed SECS Message Services. This is a transport layer based on TCP/IP protocol and a successor of the previous SEMI E4 SECS-I standard that is based on serial communication. This is also the layer where the SECS-II messages are encoded into HSMS message format.

SECS/GEM Data Items

SECS/GEM is an industry standard, that defines standard process of communication between equipment and fab host software for controlling and monitoring purposes. By connecting SECS/GEM equipment, fabs can immediately gain operational benefits. Factory hosts can collect data in multiple ways. Along with event reports, the fab host often requires to poll the equipment for current data values. The host can directly request Data values , or can be sampled periodically in a trace report this process is called Data Polling

There are 3 categories of Data Items defined in SECS/GEM standards:

 

Status Variables (SV)

Status variables are data items that identify the status of the equipment, or any of its components, such as sensors, meters, etc. Examples of status variables for process equipment are – Temperature, Pressure, Gas Flows, RF Forward Power, Spin Speed, etc. These data items are generally not attached to events such as lot start, wafer start, etc. A factory host can query the status variables to the equipment any time or can define trace data setup through which it asks the equipment of supplying status variables at regular intervals. A factory host cannot change status variables of the equipment.

Data Value Variables (DV)

Data value variables are data items that are related to a certain event, such as lot start, alarm/error occurring on the equipment, wafer processing/measurement complete, etc. Examples of data value variables are – LotID, SlotNumber, CurrentRecipe, etc. These variables change only when a certain event occurs, such as selecting a recipe, starting lot processing, etc. A factory host queries Data Value variables through defining reports and associating the reports to events.

Unlike status variables, data value variables may not have a value. For example, one of the data value variable is AlarmID, which designates the ID of the most recent alarm. However, it can be empty if there haven’t been any alarms since the equipment was turned ON. A factory host cannot change the data variables of the equipment.

Equipment Constants (EC)

Equipment constants are data items related to the configuration of the equipment – they could contain items related to the equipment hardware, software or SECS/GEM software. Unlike status variables and data value variables, a factory host can change equipment constants through SECS messages. Examples of equipment constants are – PumpDown Time Limit, Equipment Standby Time, Pins Up Wait, etc.

Data Properties:

The Data types listed above have similar properties so that it’s convenient to define the data. The equipment supplier is required to provide these properties in a SECS/GEM manual so that the fab host will be able to understand and communicate with the data. Below are some of the important data properties of the Data Types:

• ID – It’s a numeric ID that must be unique in the SECS/GEM interface. These IDs can be grouped by data type and are referred to as SVIDs (Status Variable IDs), DVIDs (Data Variable IDs) and ECIDs (Collection Event IDs).
• Name – It’s a name assigned to a data item so that we can identify it easily.
• Format –Data type of the item.
• Data formats can be simple (numeric, ASCII, Boolean) or complex (arrays, lists, structures). For example, numeric types can be I1, I2, I4, I8 (signed integer types of different byte length), U1, U2, U4, U8 (unsigned integer types) and F4 or F8 (floating point types).
• Array types and List contain multiple values in the data item. For example, image data will be formatted as a Byte Array.
• Structure types contain a specific type of data. For example, a variable may represent a slot map which contains carrier information and also list of slots with their wafer placement status.
• Value –It’s the actual value of the data item. Data values are in an accurate, efficient, self-describing binary format so that its easy for the host to interpret the data. The data format allows collection of more data and with more efficiency.

Alarms & Collection Events (CE) also have IDs and names for their identification.

Data Polling :

The fab host often gets data on a regular intervals through event reports & trace reports and that it defines. SECS/GEM also provides a system for the fab host to poll data based on its needs.

Fab Automation services.

Fab Automation Standards – SECS/GEM & EINNOSYS SOLUTIONS

The organization that defines and governs the standards for semiconductor manufacturing, equipment, automation and other relevant areas is SEMI.org. It is an international body for semiconductor manufacturers and equipment manufacturers.
Factory automation standards defined by SEMI are generally known as SECS/GEM standards, which for 200mm wafer processing is comprised of four main standards : SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) standards.

 

Lets understand what each standard covers: 

• SECS-I (E4) : This standard is a communication protocol based on RS-232 serial communications. This is a much slower as compared to HSMS.
• SECS-II (E5) : This standard defines how information is passed between an equipment and a factory host in the form of a series of stream and function messages.
• HSMS (E37): This standard defines a communication protocol based on TCP/IP.
• GEM (E30) : This standard not only defines how to use the core SECS-II messages to perform particular tasks, such as event report, data collection and recipe management but also takes care of the behaviour of the equipment when interfacing with the host.

Since SECS/GEM is a communication protocol, it is technology, platform as well as programming language independent. The host side of a connection is run on a computer system typically provided by the fab, and the equipment side of a connection is executing on a controller computer provided by the equipment manufacturer. This gives both – the factory as well as the equipment manufacturer interoperability, flexibility and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as they both are adhering to SECS/GEM standards.
SECS/Gem standards define the communication between a host computer and the equipment typically using a single connection, however multiple connection from more than one automation systems to a single equipment is possible. The message types defined by SECS are partially asymmetric – some message types are defined only for equipment use, others are defined only for host, but also many of the messages are for the similar use on either side.
The practice of connection sharing is not recommended for new deployments. It is a prevelant practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are light and don’t use much network bandwidth. It is possible to run several SECS connections on a simple desktop computer.
Most Semiconductor, solar cell, FPD and LED manufacturing factories are demanding the equipments that are SECS/GEM standard compliant. For those who are not familiar with SECS/GEM standards, to learn and implement these standards on the equipment software can be quite complex, challenging and time consuming.That is why, we at eInnoSys offer SECS/GEM software solutions for equipment manufacturers as well as factories. Integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the time and cost it takes to make their equipment SECS/GEM compatable. Similarly, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be used to simulate as a equipment or host to test SECS/GEM communication of the other.

AUTOMATION BENEFITS in SEMI CONDUCTOR INDUSTRY AND EINNOSYS SOLUTIONS TO IT

Automation in factory is an important decision to be taken at management level.

The level of automation at any fab depends on several factors, but primarily the volume in wafer starts or outs, age of equipment, complexity of process, etc. The other main aspect to fab automation lies with the kind of experience and technological maturity of the manufacturer. Setups with longer exposure to IC manufacturing and skilled manpower are more prepared and adaptable to integrate automation solutions within their fabs and various production sites. This may include systems for Automated Material Handling, Planning , Simulation, Manufacturing Execution Systems, which include production dispatching and scheduling system and also Advanced Process Control systems and so on.

Basic automation includes preventing wrong recipe errors by the technicians by automating recipe selection through GEM/SECS. Advanced fabs have far more automation done which includes Fault Detection and Classification (FDC), Yield Management software, Recipe Management System, Automated Material Handling System (AMHS), to name a few.

Semiconductor manufacturing is undoubtedly the most complex manufacturing environments. Reasons for this being strict production processes, reentrant process flows, complex expensive equipments, variable demand, high levels of automation and an huge pull of data. Yet, despite having various challenges, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and to the global economy. With the entry of highly automated wafer fabrication facilities (fabs), there is a industry trend to extend the traditional automation scope to integrate with advanced technologies.

Semiconductor technology grows very fast and thus there is a strong positive force to increase productivity using the existing assests . And this positive force has lead to the need of full automation to increase the existing productive. In fab automation, technological upgrades have to be taken into considerations on continuous bases. 

We provide factory automation solutions, systems integration and consulting services to wafer fabs, assembly and test facilities across the globe.

We offer various products for FABS and ASSEMBLY facilities.

 

eInnoSys is a pure automation company for semiconductor and other related industries such as PV (solar), MEMS, Flat Panel Display (FPD), LED and other such electronics industries. We serve Equipment Manufacturers (OEMs) and factories – Fabs, ATMs (Assembly Test Manufacturing). We are a customer focused and solution oriented company, offering automation products as well as custom automation solutions for OEMs and factories.

We consider ourselves as technical partners of our customers and not just software or automation solution providers who would build systems as per customer requirements. In addition to great automation software, we provide valuable insights to our customer based on our vast experience and ensure that we create the most customer value through our services.

Here is how EINNOSYS can help to give most effective automation solutions which takes care of all the challenges in implementing Automation. In our experience, most fab automation systems have an ROI of less than 1 year, so they pay for themselves in a very short period of time.

Our Fab Automation solutions include:

Yield management software

Cycle time Improvement

Improving OEE/Throughput

Advanced Process Control (APC)

Fault Detection & Classification (FDC)

Saving Manufacturing Cost

https://www.einnosys.com/introduction-secs-gem/

AUTOMATION BENEFITS in SEMI CONDUCTOR INDUSTRY AND EINNOSYS SOLUTIONS TO IT

Automation in factory is an important decision to be taken at management level.
The level of automation at any fab depends on several factors, but primarily the volume in wafer starts or outs, age of equipment, complexity of process, etc. The other main aspect to fab automation lies with the kind of experience and technological maturity of the manufacturer. Setups with longer exposure to IC manufacturing and skilled manpower are more prepared and adaptable to integrate automation solutions within their fabs and various production sites. This may include systems for Automated Material Handling, Planning , Simulation, Manufacturing Execution Systems, which include production dispatching and scheduling system and also Advanced Process Control systems and so on.

Basic automation includes preventing wrong recipe errors by the technicians by automating recipe selection through GEM/SECS. Advanced fabs have far more automation done which includes Fault Detection and Classification (FDC), Yield Management software, Recipe Management System, Automated Material Handling System (AMHS), to name a few.
Semiconductor manufacturing is undoubtedly the most complex manufacturing environments. Reasons for this being strict production processes, reentrant process flows, complex expensive equipments, variable demand, high levels of automation and an huge pull of data. Yet, despite having various challenges, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and to the global economy. With the entry of highly automated wafer fabrication facilities (fabs), there is a industry trend to extend the traditional automation scope to integrate with advanced technologies.
Semiconductor technology grows very fast and thus there is a strong positive force to increase productivity using the existing assests . And this positive force has lead to the need of full automation to increase the existing productive. In fab automation, technological upgrades have to be taken into considerations on continuous bases.
We provide factory automation solutions, systems integration and consulting services to wafer fabs, assembly and test facilities across the globe.
We offer various products for FABS and ASSEMBLY facilities.
Our Fab Automation solutions include:
Yield management software
Cycle time Improvement
Improving OEE/Throughput
Advanced Process Control (APC)
Fault Detection & Classification (FDC)
Saving Manufacturing Cost

SECS/GEM for non-GEM/SECS Equipment

Can’t get SECS/GEM on your fab or assembly equipment? We WILL get you!

If you have an equipment without GEM/SECS capability and if you can’t get it from the OEM, we can help you. eInnoSys provides a software solution that offers most of the GEM/SECS features. It doesn’t matter how old the equipment is or whether the equipment is running through a computer with Windows or Unix/Linux operating system, our solution works on most equipment. This solution works equally well on both wafer fab equipment as well as back-end test, assembly and packaging equipment. 

 

With eInnoSys provided GEM/SECS solution on your equipment, you can achieve the same benefit on those equipment as you do with modern SECS/GEM compliant equipment. Now you can improve yield, collect and analyze data automatically, download and upload recipes and a lot more. When it comes to providing GEM/SECS on an equipment without OEM provided solution, there is no one-size-fit-all approach. That’s why our engineering team first evaluates your equipment and recommends a solution that is best for you.

SECS/GEM Simulator Introduction and Features

EINNOSYS has developed a software application – EIGEMSim to help OEMs and fabs/assemblies test SEMI compliance for SECS/GEM on an equipment.
EIGEMSim SECS/GEM simulator can be configured to simulate either an equipment or factory host depending on the use case. It allows creation, configuration, transmission and receipt of SECS messages.
EIGEMSim facilities the message transfers through Message Dictionary.
There are two ways to create and configure SECS Messages – through a wizard within EIGEMSim or by typing them in SML format in a text editor and then opening the SML file in EIGEMSim. All messges sent and received are logged.

 

Features of EIGEMSim (SECS/GEM Simulator) :

• Runs on Windows & Linux
• Comes with most commonly used SECS messages pre-configured to get you up and running of your complaince testing quickly
• User friendly & intuitive UI for configuring and sending messages.
• It can be configured either as the equipment or the Factory host during the development.
• Provides Logs of all the incoming and outgoing messages.

SECS GEM Simulator Features

SECS GEM Simulator

SECS GEM Features

SECS/GEM Simulator Features

GEM/SECS simulator

GEM/SECS features

SECS/GEM Simulator Features

SECS/GEM Simulator

SECS/GEM Features

SECS/GEM

GEM/SECS